Temperature Range:-20°C to +200°C
Heating Rate:0.5°C/s
Resolution:0.01°C
Stability:+/- 0.1°C over 24 hours
Cooling Capability:Instantaneous temperature drop to ambient within 5 minutes
Max Load Capacity:200g
Material:Stainless Steel
Size:120mm x 120mm
Power Supply:12V DC
Dimensions:150mm x 150mm x 30mm
Weight:2.5kg
The ADVANTEST BLG-022829 Heated Wafer Stage is engineered to offer unparalleled precision in temperature control during semiconductor fabrication processes, ensuring optimal results and reducing the risk of defects.
Featuring a robust stainless steel construction, this heated wafer stage ensures durability and resistance to corrosive environments commonly found in cleanrooms.
With its fast heating rate of 0.5°C per second, this module significantly accelerates the processing time without compromising temperature accuracy, making it an indispensable tool for high-efficiency semiconductor production lines.
Equipped with advanced temperature stability features, the BLG-022829 maintains a remarkable precision of +/- 0.1°C over a 24-hour period, ensuring consistent performance throughout long production cycles.
Designed for ease of integration, the heated wafer stage comes with a standard 12V DC power supply and compact dimensions, facilitating its use in a wide range of existing manufacturing setups.











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